The past decade has witnessed the rapid development of a broad range of strategies used to pattern polymers. Intense interest in polymer patterning originated from the diversity of existing synthetic ...
Researchers have developed a one-step, facile method to pattern graphene by using stencil mask and oxygen plasma reactive-ion etching, and subsequent polymer-free direct transfer to flexible ...
Self-aligned lithographic process techniques are playing an increasingly important role in advanced technology nodes. Even with the growing use of extreme ultraviolet (EUV) lithography, ...
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